SOI-wafer 3”, P/Bor – 1 pcs; SOI-wafer 3”, N /As, N/Phos – 7 pcs ; SOI-wafer 3”, N/Sb, N/Phos -2 pcs; SOI-wafer 3”, P/Bor – 1 pcs; SOI-wafer 3”, N/Phos P/Bor – 5 pcs ; Si-wafer 4 », prime, N/Phos – 75 pcs